Ms. Charmaine Goh Profile

Charmaine Goh

at A*STAR Institute of Microelectronics

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Publications (1)

Proceedings Article | 13 March 2024 Presentation + Paper

Low-loss 800nm-thick PECVD silicon nitride photonic platform on 300-mm wafer

Hong Cai, Bo Li, Yiding Lin, Haitao Yu, Steven Hou Jang Lee, Chin Khang Tew, Jae Ok Yoo, Charmaine Goh, Shervonne Woon, Doris Keh Ting Ng, Navab Singh, Xianshu Luo, Lennon Yao Ting Lee

Proceedings Volume 12898, 1289802 (2024) https://doi.org/10.1117/12.3002146

KEYWORDS: Silicon nitride, Waveguides, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Silicon photonics, Film thickness, Fabrication, Chemical mechanical planarization, Photonic integrated circuits

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