Dr. Cheng Peng Profile

Dr. Cheng Peng

Manager at Maxim Integrated

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Publications (2)

Proceedings Article | 5 June 1998 Paper

100-nm CMOS gates patterned with 3 sigma below 10 nm

Hua-Yu Liu, Carlos Diaz, Chiu Chi, R. Kavari, Peng Cheng, Min Cao, Robert Gleason, Brian Doyle, Wayne Greene, G. Ray

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309593

KEYWORDS: Transistors, Lithography, Semiconducting wafers, Etching, Photomasks, Optical lithography, Oxides, Silicon, Deep ultraviolet, Process control

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Proceedings Article | 1 October 1990 Paper

Improved design of AlAs/GaAs resonant tunneling diodes

Peng Cheng, James Harris

Proceedings Volume 1283, (1990) https://doi.org/10.1117/12.20763

KEYWORDS: Diodes, Superlattices, Physics, Silicon, Gallium arsenide, Electrons, Aluminum, Doping, Interfaces, Solids

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