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Dr. Chieh-En Lee
at National Yang Ming Chiao Tung Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Enhancing CD-SEM accuracy with attention-boosted Noise2Noise model
Proceedings Volume 12955, 129552C (2024) https://doi.org/10.1117/12.3009959
KEYWORDS: Education and training, Data modeling, Performance modeling, Denoising, Signal to noise ratio, Scanning electron microscopy, Manufacturing, Critical dimension metrology
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