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Chris Marotta
Product Marketing Engineer at Thermo Fisher Scientific Inc
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Publications (1)
Proceedings Article | 11 March 2002 Paper
Repair and imaging of 193-nm MoSiON phase-shift photomasks
Chris Marotta, Joshua Lessing, Jeff Marshman, Marcus Ramstein
Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458283
KEYWORDS: Photomasks, Ion beams, Opacity, Phase shifts, Quartz, Transmittance, Carbon, Scanning electron microscopy, Molybdenum, Atomic force microscopy
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