Dr. Chun Chieh Han Profile

Dr. Chun Chieh Han

at Taiwan Mask Corp

SPIE Involvement:

Author

Area of Expertise:

photomask , lithography , semiconductor

Publications (3)

Proceedings Article | 26 August 2024 Paper

Local registration (LREG) measurement for beam deflector monitoring

Chun Chieh Han, Yi Chen Chuang, Wei Shan Chen, Wen Wei Lee, Colbert Lu

Proceedings Volume 13177, 1317710 (2024) https://doi.org/10.1117/12.3032675

KEYWORDS: Image registration, Printing, Optical testing, Overlay metrology, Optical proximity correction, Metrology, Vestigial sideband modulation, Semiconducting wafers, Reticles, Photoresist materials

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Proceedings Article | 11 November 2022 Presentation

Critical dimension performance and defect control on multi-etching

Chun Chieh Han

Proceedings Volume PC12293, PC122930G (2022) https://doi.org/10.1117/12.2641684

KEYWORDS: Critical dimension metrology, Reticles, Particles, Chromium, Etching

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Proceedings Article | 16 September 2022 Paper

Enhancement of the proximity and aerial imaging performance of a software-based data path for raster-scanned multi-beam laser writer

Hsiang Jen Yang, Po Sheng Wang, Chun Chieh Han, Yi Min Lin, Wen Wei Lee, Wei Shen Chen

Proceedings Volume 12325, 123250T (2022) https://doi.org/10.1117/12.2640527

KEYWORDS: Photomasks, Raster graphics, Reticles

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