Dr. Cinti X. Chen Profile

Dr. Cinti X. Chen

at Advanced Micro Devices Inc

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Publications (2)

Proceedings Article | 3 April 2010 Paper

Systematic failure debug and defective pattern extraction for FPGA product yield improvement

Cinti Chen, Joe Zhao, Ping Zhang, Raymond Xu

Proceedings Volume 7641, 76410C (2010) https://doi.org/10.1117/12.848185

KEYWORDS: Field programmable gate arrays, Semiconducting wafers, Defect inspection, Yield improvement, Inspection, Metals, Scanning electron microscopy, Optical proximity correction, Semiconductors, Overlay metrology

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Proceedings Article | 30 July 2002 Paper

Flare and its impact on low-k1 KrF and ArF lithography

Bruno La Fontaine, Mircea Dusa, Alden Acheta, Cinti Chen, Anatoly Bourov, Harry Levinson, Lloyd Litt, Melchior Mulder, Rolf Seltman, Judith van Praagh

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474598

KEYWORDS: Modulation transfer functions, Point spread functions, Spatial frequencies, Photomasks, Scanners, Modulation, Lithography, Light scattering, Semiconducting wafers, Critical dimension metrology

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