KEYWORDS: Charge-coupled devices, Signal detection, Sensors, Point spread functions, CCD image sensors, Reflection, Reflectivity, Microscopes, Modulation transfer functions, Near field optics
The sensitivity of a solid state detector array varies as a result of changes in transmission, diffusion effects and scattering. This variation will occur on a scale length less than that of a single pixel and its knowledge is of importance for improved device design and in applications such as event centroiding in photon counting systems. This paper reports on a measurement of sensitivity variation on a sub-pixel scale for a two-phase front-illuminated CCD. The measurement was made using a scanning reflection microscope. Variation in sensitivity between the phases within a pixel and on much smaller spatial scale are clearly observed as well as crosstalk.
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