Dr. Daniel R. Ward Profile

Dr. Daniel R. Ward

at Sandia National Labs

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Author

Publications (2)

SPIE Journal Paper | 6 March 2021 Open Access

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

Aaron Katzenmeyer, Sanja Dmitrovic, Andrew Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Anderson, Scott Schmucker, Jeffrey Ivie, Deanna Campbell, Daniel Ward, David Scrymgeour, George Wang, Shashank Misra

JM3, Vol. 20, Issue 01, 014901, (March 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.014901

KEYWORDS: Hydrogen, Silicon, Scanning tunneling microscopy, Optical lithography, Temperature metrology, Lithography, Pulsed laser operation, Semiconductor lasers, Manufacturing, Microelectronics

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Proceedings Article | 23 March 2020 Presentation + Paper

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

A. Katzenmeyer, S. Dmitrovic, A. Baczewski, E. Bussmann, T.-M. Lu, E. Anderson, S. Schmucker, J. Ivie, D. Campbell, D. Ward, G. Wang, S. Misra

Proceedings Volume 11324, 113240Z (2020) https://doi.org/10.1117/12.2551455

KEYWORDS: Hydrogen, Silicon, Scanning tunneling microscopy, Pulsed laser operation, Optical lithography, Manufacturing, Lithography, Phosphorus, Absorption

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