Dr. Deh-Ming Shyu
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 13 May 2013 Paper
Proceedings Volume 8788, 87881Z (2013) https://doi.org/10.1117/12.2021039
KEYWORDS: Semiconducting wafers, Overlay metrology, Wafer bonding, Digital image correlation, Microscopy, Prisms, Microscopes, Infrared radiation, Silicon, Error analysis

Proceedings Article | 6 April 2012 Paper
Proceedings Volume 8324, 832414 (2012) https://doi.org/10.1117/12.916370
KEYWORDS: Optical microscopes, Scanning electron microscopy, Etching, Silicon, Image processing, Microscopes, Objectives, Algorithm development, Semiconducting wafers, Metrology

Proceedings Article | 3 April 2012 Paper
Y. Ku, D. Shyu, P. Chang, W. Hsu
Proceedings Volume 8324, 832411 (2012) https://doi.org/10.1117/12.915810
KEYWORDS: Semiconducting wafers, Metrology, 3D metrology, Silicon, Reflectivity, Copper, Metals, Infrared imaging, Confocal microscopy, Reflectometry

Proceedings Article | 27 May 2011 Paper
Y. S. Ku, D. M. Shyu, W. T. Hsu, P. Y. Chang, Y. C. Chen, H. L. Pang
Proceedings Volume 8082, 80820I (2011) https://doi.org/10.1117/12.889401
KEYWORDS: Semiconducting wafers, Silicon, Copper, 3D metrology, Metrology, Confocal microscopy, Reflectivity, Microscopes, Metals, Annealing

SPIE Journal Paper | 1 December 2009
OE, Vol. 48, Issue 12, 123601, (December 2009) https://doi.org/10.1117/12.10.1117/1.3275449
KEYWORDS: Overlay metrology, Diffraction, Scatterometry, Scatter measurement, Critical dimension metrology, Optical engineering, Detection and tracking algorithms, Diffraction gratings, Photoresist materials, Semiconductors

Showing 5 of 13 publications
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