KEYWORDS: Vibration, Signal processing, Confocal microscopy, Wavelet transforms, Laser processing, Signal to noise ratio, Wavelets, Denoising, Vibrometry, Signal intensity
In order to solve the problem that the laser confocal vibration measurement method is susceptible to noise and interference signals. This paper proposes a laser confocal vibration signal processing method based on wavelet denoising. By using wavelet transform to denoise the laser confocal vibration signal, this method effectively eliminates noise and interference signals. The experiment shows that the use of wavelet transform can effectively improve the test results of laser confocal vibration measurement, achieving a measurement bandwidth of 100MHz and a nanometer-level amplitude resolution. This method provides ideas for expanding the application of the laser confocal vibration measurement in complex scenes.
We introduced a new method called divided-aperture dual-differential confocal microscopy (DADDCM), which delivered large sensing measurement range and high axial focusing capability for profile measurement. There are three virtual pinholes, one is on the optical axis and the other two are placed either side of the optical axis. The signal from each off-axis will be processed with the on-axis one, and the processed signals are added up to acquire the axial intensity response curve with large linear sensing range. So, it can realize the large-scale non-axial fast sensing scanning with an axial focusing capability of ~2 nm and an improved linear sensing range up to 2.1 times that of divided-aperture differential confocal microscopy (DADCM). Benefiting from this large linear sensing range, a non-axial scanning imaging detection of microstructures is implemented, which leads to a high scanning speed. This method provides a new high precision and fast measurement method for the three-dimensional morphology of microstructure.
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