Dr. Douglas R. Sparks Profile

Dr. Douglas R. Sparks

at Integrated Sensing Systems Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 23 December 2003 Paper

Reliable vacuum packaging using NanoGetters and glass frit bonding

Douglas Sparks, Sonbol Massoud-Ansari, Nader Najafi

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.530414

KEYWORDS: Packaging, Wafer bonding, Glasses, Silicon, Microelectromechanical systems, Sensors, Particles, Metals, Semiconducting wafers, Resonators

Read Abstract +

Proceedings Article | 5 September 1997 Paper

Automotive applications for micromachining

Douglas Sparks, Shih-Chia Chang

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284483

KEYWORDS: Packaging, Integrated circuits, Integrated circuit design, Integrated circuit packaging, Wafer bonding, Plasma etching, Sensors, Microelectromechanical systems, Silicon, Micromachining

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years