ASELSAN has made significant progress on developing its short-wave infrared (SWIR) technology, with a focus on improving dark current, quantum efficiency, and operability. In recent work, shunt current and generation-recombination current have been identified as the predominant dark current mechanisms. Shunt current can be suppressed by reducing the dangling bond count which requires optimizing the focal plane array passivation, and generation-recombination current can be reduced by improving the device design. Extensive work on process optimization employing various passivation schemes combined with theoretical layer design has lowered the SWIR focal plane array pixel dark current values down to < 1 nA/cm2. Furthermore, achieving low dark current without sacrificing high quantum efficiency (exceeding 80%), by building on the previous process and post-process work, has enhanced the sensor’s ability to capture faint signals. 640x512 format and 15 μm pitch SWIR focal plane arrays coupled with ASEL64015CG read-out circuits have consistently reached > 99.9% operability. After maturing the development work, ASELSAN launches its SWIR detector, LEOP-640/15-SW, pioneering the company’s photodetector production. In this paper, the results of the theoretical and experimental R and D work on LEOP photodetector development and production at ASELSAN are presented.
Recent advances in short-wave infrared (SWIR) technology including numerous new applications in civil areas, fusion with visible wavelengths, and integration with active imaging systems triggered the SWIR photodetector research at ASELSAN for both passive and active imaging. SWIR focal plane arrays with a 640x512 format and 15μm pitch were developed and coupled with ASEL64015C readout circuits which had been designed at ASELSAN as well. Through extensive research and development dark current density values <10 nA/cm2 (at 20°C) and operabilities >;99% were achieved. This paper reviews the work that has been conducted on SWIR detector development at ASELSAN.
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