Emma Litterio
at STMicroelectronics SRL
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 25 May 2022 Poster + Paper
Proceedings Volume 12055, 120550W (2022) https://doi.org/10.1117/12.2614005
KEYWORDS: Semiconducting wafers, Lithography, Silicon, Reflectivity, Photoresist materials, Photomasks, Scanning electron microscopy, Photomicroscopy

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120E (2021) https://doi.org/10.1117/12.2583933
KEYWORDS: Lithography, Chemistry, Yield improvement, Semiconductor manufacturing, Semiconducting wafers, Reliability, Photosensitive materials, Photoresist materials, Manufacturing

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 1132622 (2020) https://doi.org/10.1117/12.2551864
KEYWORDS: System on a chip, Semiconducting wafers, Coating, Polymers, Liquids, Lithography, Scanning electron microscopy, Photoresist materials

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10962, 1096213 (2019) https://doi.org/10.1117/12.2514722
KEYWORDS: Semiconducting wafers, Coating, Polymers, Scanning electron microscopy, Photomasks, Silicon, Lithography, Optical microscopy

Proceedings Article | 20 March 2018 Paper
Pietro Cantù, Chiara Catarisano, Nicoletta Corneo, Alessandro Dundulachi, Emma Litterio, Valeria Mantovani, Matteo Patelmo, Benedetta Triulzi
Proceedings Volume 10588, 105880S (2018) https://doi.org/10.1117/12.2297256
KEYWORDS: Critical dimension metrology, Metals, Data modeling, Neural networks, Photoresist materials, Convolution, Artificial neural networks, Machine learning, Optical lithography, Evolutionary algorithms

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top