Dr. Emmanuel Saucedo-Flores Profile

Dr. Emmanuel Saucedo-Flores

at Univ de Guadalajara

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Publications (1)

Proceedings Article | 29 July 2004 Paper

Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers

Emmanuel Saucedo-Flores, Ruben Ruelas, Alejandro Contreras-Nuno, Jose Mireles

Proceedings Volume 5389, (2004) https://doi.org/10.1117/12.545329

KEYWORDS: Etching, Actuators, Microelectromechanical systems, Optical lithography, Micromachining, Oxides, Photoresist materials, Standards development, Low pressure chemical vapor deposition, Silicon

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