Dr. Eunpa Kim Profile

Dr. Eunpa Kim

at Samsung Electronics

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Publications (2)

Proceedings Article | 10 April 2024 Poster

Validation of high-throughput AFM for copper pad metrology in high volume manufacturing

Kyung Souk Yi, Min Hong, Jiyeon Kim, Eunpa Kim, Kwang Soo Kim, Kyong Wook Noh, Su-Young Lee, Myungjun Lee, Yusin Yang, Hokyun Chin, Arseniy Kalinin, Irene Battisti, Erik Simons, Seokhan Kim, ShihWei Yu, Nelda Antonovaité, Niranjan Saikumar, Rudolf Wilhelm, Hamed Sadeghian

Proceedings Volume 12955, 129552U (2024) https://doi.org/10.1117/12.3010488

KEYWORDS: Semiconducting wafers, High volume manufacturing, Metrology, Copper, Chemical mechanical planarization, Surface finishing, Semiconductor manufacturing, Process control, Miniaturization, Atomic force microscopy

Proceedings Article | 27 April 2023 Presentation + Paper

Deep learning-based automatic defect classification for semiconductor manufacturing

Eunpa Kim, Myungchul Shin, Hee-Jun Ahn, Soyoon Park, Dong-ryul Lee, Haesung Park, Minjung Shin, Dongchul Ihm

Proceedings Volume 12496, 124961H (2023) https://doi.org/10.1117/12.2658638

KEYWORDS: Semiconductor manufacturing, Inspection, Image classification, Scanning electron microscopy, Deep learning, Semiconductors, Classification systems

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