Prof. Frederik S. G. Ceyssens Profile

Prof. Frederik S. G. Ceyssens

at KU Leuven

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Author

Publications (2)

Proceedings Article | 20 December 2006 Paper

A fluidic micro-actuator with an integrated inductive position sensor

M. De Volder, J. Coosemans, F. Ceyssens, J. Peirs, R. Puers, D. Reynaerts

Proceedings Volume 6415, 64150F (2006) https://doi.org/10.1117/12.695525

KEYWORDS: Actuators, Position sensors, Sensors, Microfluidics, Microactuators, Control systems, Inductance, Aluminum, Copper, Transformers

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Proceedings Article | 20 December 2006 Paper

Pattern transfer over extreme topographies using a SU-8 leveling process

Frederik Ceyssens, Robert Puers

Proceedings Volume 6415, 64151G (2006) https://doi.org/10.1117/12.695843

KEYWORDS: Coating, Photoresist materials, Semiconducting wafers, Micromachining, Etching, Photoresist processing, Metals, Electroplating, Chromium, Standards development

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