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Dr. Fridrich Egyenes
at Slovak Academy of Sciences
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Publications (1)
Proceedings Article | 15 March 2024 Presentation + Paper
Thermal properties of Ga2O3 thin films and devices prepared on sapphire and SiC substrates by liquid-injection MOCVD
Filip Gucmann, Milan Ťapajna, Kristína Hušeková, Edmund Dobročka, Alica Rosová, Peter Nádaždy, Peter Eliáš, Fridrich Egyenes, Fedor Hrubišák, Hemendra Chouhan, Javad Keshtkar, Xiang Zheng, James Pomeroy, Martin Kuball, Xinglin Xiao, Yali Mao, Biwei Meng, Guoliang Ma, Chao Yuan
Proceedings Volume 12887, 1288705 (2024) https://doi.org/10.1117/12.3013087
KEYWORDS: Gallium oxide, Silicon carbide, Sapphire, Field effect transistors, Thin film devices, Metalorganic chemical vapor deposition, Thin films, Semiconductors, Interfaces, Electrical conductivity
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