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George Damas
at ASML
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 1 November 1991 Paper
Hartmann-Shack wavefront sensor using a binary optic lenslet array
Proceedings Volume 1544, (1991) https://doi.org/10.1117/12.49374
KEYWORDS: Wavefronts, Wavefront sensors, Sensors, Interferometers, Diffraction, Optical arrays, Reconstruction algorithms, Charge-coupled devices, Calibration, Wavefront reconstruction
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