Two types of the large bimorph deformable mirrors with the size of 410x468 mm and 320 mm were developed and tested. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack- Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of 0.033 μm (RMS). The possibility of correction of the aberrations in high power lasers was numerically demonstrated.
The deformable mirror with the size of 410x468 mm controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack-Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of 0.033 μm (RMS). The possibility of correction of the aberrations in high power lasers was numerically demonstrated.
In this paper we consider two approaches widely used in testing of wide aperture optics: Fizeau interferometer and Shack-Hartmann wavefront sensor. Fizeau interferometer that is common instrument in optical testing can be transformed to a device using Shack-Hartmann wavefront sensor, the alternative technique to check wide aperture optical components. We call this device Hartmannometer, and compare its features to those of Fizeau interferometer.
It is suggested to reconstruct the phase screens with the use of stacked-actuator deformable mirror and to compensate for the introduced distortions by the bimorph mirror. The reproducing and correction results are presented in the paper. The problems of the reconstruction and compensation are discussed.
It is well known that turbid medium such as fog or biological tissues causes light scatter. This phenomenon is known as major impediment for imaging and focusing of light. Thus it is important to understand the impact of the turbid medium on the light characteristics, namely intensity and phase distributions. In this work laser beam propagation through the scattering suspension of polystyrene microspheres in distilled water was investigated both theoretically and experimentally. We obtained the dependence of the wavefront aberrations on the particles concentration and shown the existence of high-order symmetric wavefront aberrations of the laser beam passed through turbid medium. The investigation showed that with the use of bimorph deformable mirror the wavefront aberrations of scattered light could be effectively corrected.
It is suggested to reconstruct the phase screens with the use of different deformable mirror types. In this work we present the results of the phase screen reproducing with the use of stacked-actuator deformable mirror and bimorph one. The reconstruction results were compared. The problems of the reconstruction were discussed.
We present in this paper a new in-situ technique we have developed to monitor and to control broad ion beam processes. The base of this technique is to capture, with a Peltier-cooled CCD camera, the light emitted when the ions hit the surface of the wafer during the process. The intensity of the light and its distribution across the irradiated area is calculated from the CCD camera picture. In our processes, we measure the intensity level of the light emitted to monitor the growth or the etching of silicon oxide films by ultra slow single and multicharged ions. We also measure the intensity distribution of the light emitted from the irradiated area to control and monitor the broad ion beam uniformity. The possibility to use an in-situ monitoring system is an advantage for the equipment we develop for semiconductor manufacturing, as it will give an immediate control on the quality of every processed wafer.
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