Dr. Göksel Durkaya Profile

Dr. Göksel Durkaya

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Publications (4)

SPIE Journal Paper | 27 October 2021

Development of an optical measurement system for surface depth measurements and study of focus effect on determination of steel inclusion content by EN-10247

Goksel Durkaya, Huseyin Kurtuldu, Baris Çetin, Burak Bal

OE, Vol. 60, Issue 10, 103104, (October 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.10.103104

KEYWORDS: Optical testing, Objectives, Optical engineering, Inspection, Surface finishing, Metals, Cameras, Manufacturing, Laser scattering, Interferometers

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Proceedings Article | 8 November 2012 Paper

Effect of radiation exposure on the surface adhesion of Ru-capped MoSi multilayer blanks

Göksel Durkaya, Abbas Rastegar, Hüseyin Kurtuldu

Proceedings Volume 8522, 852214 (2012) https://doi.org/10.1117/12.976060

KEYWORDS: Particles, Ions, Lamps, Surface roughness, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Neodymium, Radiation effects, Ruthenium

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Proceedings Article | 23 March 2012 Paper

Effect of radiation on the defectivity and stability of Ru-capped MoSi multilayer blanks

Abbas Rastegar, Göksel Durkaya, Aron Cepler, Matt House, Steve Novak

Proceedings Volume 8322, 832211 (2012) https://doi.org/10.1117/12.916631

KEYWORDS: Oxides, Silicon, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Scanning probe microscopy, Radiation effects, Ruthenium, Oxidation

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Proceedings Article | 18 August 2009 Paper

Optical and structural properties of InN grown by HPCVD

M. Buegler, M. Alevli, R. Atalay, G. Durkaya, I. Senevirathna, M. Jamil, I. Ferguson, N. Dietz

Proceedings Volume 7422, 742218 (2009) https://doi.org/10.1117/12.828163

KEYWORDS: Sensors, Luminescence, Crystals, X-ray diffraction, Chemical vapor deposition, Raman spectroscopy, Gallium nitride, Sapphire, Chemical analysis, Indium nitride

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