Hannes Mehner
at Technische Univ. Ilmenau
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 June 2015 Paper
Hannes Mehner, Silvan Schwebke, Steffen Leopold, Martin Hoffmann
Proceedings Volume 9517, 95170Z (2015) https://doi.org/10.1117/12.2178726
KEYWORDS: Binary data, Microsystems, Switching, Sensors, Actuators, Microsensors, Silicon, Resistance, Transducers, Video

Proceedings Article | 21 May 2015 Paper
Proceedings Volume 9517, 95170K (2015) https://doi.org/10.1117/12.2178867
KEYWORDS: Actuators, Electrodes, Hyperspectral imaging, Deep reactive ion etching, Microsystems, Confocal microscopy, Microelectromechanical systems, Charge-coupled devices, Imaging systems, Aluminum

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