Francesco Di Giacomo, Yulia Galagan, Santhosh Shanmugam, Harrie Gorter, Fieke van den Bruele, Gerwin Kirchner, Ike de Vries, Henri Fledderus, Herbert Lifka, Sjoerd Veenstra, Tom Aernouts, Pim Groen, Ronn Andrissen
Organometallic halide perovskite solar cells (PSCs) are extremely promising novel materials for thin-film photovoltaics, exhibiting efficiencies over 22% on glass and over 17% on foil 1, 2 . First, a sheet-to-sheet (S2S) production of PSCs and modules on 152x152 mm2 substrates was established, using a combination of sputtering, e-beam evaporation, slot die coating and thermal evaporation (average PCE of 14.6 ± 1.3 % over 64 devices, more than 10% initial PCE on modules). Later the steps towards a roll-to-roll production will be investigated, starting from the optimization of the stack to make it compatible with a faster production at low temperature. A water based SnOx nanoparticles dispersion was used as solution processable ETL, and the deposition process was scaled-up from spin coating to R2R slot die coating on a 300 mm wide roll of PET/ITO. R2R production is often carried out in ambient atmosphere and involve the use of large volumes of materials, thus a first point is the development of a green solvent and precursor system for the perovskite layer to prevent the emission of toxic compound in the environment. The first results on device fabrication are encouraging, which allow partial R2R manufacturing of flexible PSC (R2R coating of SnOx and perovskite, S2S for Spiro-OMeTAD and gold) with stabilized PCE of 12.6%, a remarkable value for these novel devices. This result can be considered an important milestone towards the production of efficient, low cost, lightweight, flexible PSC on large area.
The proper long term operation of organic electronic devices like organic photovoltaics OPV depends on their resistance to environmental influences such as permeation of water vapor. Major efforts are spent to encapsulate OPV. State of the art is sandwich-like encapsulation between two ultra-barrier foils. Sandwich encapsulation faces two major disadvantages: high costs (~1/3 of total costs) and parasitic intrinsic water (sponge effects of the substrate foil).
To fight these drawbacks, a promising approach is to use the OPV substrate itself as barrier by integration of an ultra-barrier coating, followed by alternating deposition and structuring of OPV functional layers. In effect, more functionality will be integrated into less material, and production steps are reduced in number. All processing steps must not influence the underneath barrier functionality, while all electrical functionalities must be maintained.
As most reasonable structuring tool, short and ultrashort pulsed lasers USP are used. Laser machining applies to three layers: bottom electrode made of transparent conductive materials (P1), organic photovoltaic operative stack (P2) and top electrode (P3).
In this paper, the machining of functional ~110…250 nm layers of flexible OPV by USP laser systems is presented. Main focus is on structuring without damaging the underneath ultra-barrier layer. The close-to-process machining quality characterization is performed with the analysis tool “hyperspectral imaging” (HSI), which is checked crosswise with the "gold standard" Ca-test. It is shown, that both laser machining and quality controlling, are well suitable for R2R production of OPV.
We present the development of laser processes for flexible OPV on roll-to-roll (RR2R) produced thin film barrier with indium tin oxide (ITO) as transparent conductive (TC) bottom electrode. Direct laser structuring of ITO on such barrier films (so-called P1 process) is very challenging since the layers are all transparent, a complete electrical isolation is required, and the laser process should not influence the barrier performance underneath the scribes. Based on the optical properties off the SiN and ITTO, ultra-short pulse lasers inn picosecond and femtosecond regime with standard infrared (IR) wavelength as well as lasers with new a wavelength (22 μm regime) are tested for this purpose. To determine a process window for a specific laser a fixed methodology is adopted. Single pulse ablation tests were followed by scribing experiments where the pulse overlap was tuned by varying laser pulse fluence, writing speed and frequency. To verify that the laser scribing does not result inn barrier damage underneath, a new test method was developed based on the optical Ca-test. This method shows a clear improvement in damage analysis underneath laser scribes over normal optical inspection methods (e.g. microscope, optical profiler, SEM). This way clear process windows can be obtained for IR TC patterning.
This paper presents a study of selective ablation of thin organic films (LEP- Light Emitting Polymer, PEDOT:PSS- Poly
3,4-ethylenedioxythiophene: polystyrene sulfonate) by using 248 nm Excimer laser, on various kinds of multilayered
SiN barrier foils for the development of Organic Light Emitting Diodes (OLED). Different Silicon Nitride (SiN) barrier
foils with dedicated absorption spectra are taken into account for this purpose. The drive for looking into different types
of SiN originates from the fact that the laser selective removal of a polymer without damage to the barrier layer
underneath is challenging in the dynamic laser processing of thin films. The barrier is solely responsible for the proper
encapsulation of the OLED stack. The main limitation of current OLED design is its shorter life span, which is directly
related to the moisture or water permeation into the stack, leading to black spots. An optimization of laser parameters
like fluence and number of shots has been carried out for the various types of SiN barrier foils. We are able to obtain a
wider working process window for the selective removal of LEP and PEDOT:PSS from SiN barrier, by variation of the
different types of SiN.
In this work a double stream ga puff target was applied in experiments connected with a laser plasma soft x-ray source. The results of the gas puff target density measurements was presented. The experimental results of x-ray measurements concern two experiments. The first one was performed in the Institute of Optoelectronics using 1 ns Nd:glass laser. In this experiment soft x-ray radiation around 1 keV and 3 keV was investigated. The measurements were performed using an x-ray pinhole camera, a flat crystal spectrograph and a soft x-ray photodiode. The second experiment was performed in the Institute for Plasma Physics using a 27 ns KrF laser. In this experiment EUV radiation of the wavelength around 13 nm from the gas puff plasma was measured using a multilayer mirror combined with an x-ray detector. In both experiments it was shown that the emission from the plasma created in the double stream gas puff target was even an order of magnitude higher than in a case of using the ordinary gas puff target.
The EUV light source is a critical factor for the success of Extreme Ultraviolet Lithography (EULV), ASML, FOM and Philips Research have developed a portable set of diagnostics for the characterization of candidate EUV sources, called Flying Circus. The set of diagnostics is used to perform the following measurements: Absolute EUV power measurements, pulse-to-pulse intensity fluctuations, plasma size and shape, size/shape/positional stability, spectral distribution of radiation and stability, timing jitter and contamination by the source. These measurements are to be performed on-site, at the laboratories of the different source developers. The design as well as the first calibration measurements performed by the Flying Circus on the FOM Xe double gas jet source and on the PLEX z-pinch source will be discussed.
A novel laser plasma EUV source geometry based on a (pulsed) double gas jet system has been characterized for utilization in EUV Lithography. The use of a secondary annular jet of a buffer gas in conjunction with the primary jet of target gas provides a considerable gain in EUV yield of an order of magnitude. The best CE data at 12.8 nm were obtained using xenon as target gas and hydrogen as buffer gas. The plasma source was driven using a short-wavelength KrF laser (0.9 J, 27 ns). Conversion efficiencies (CE) and EUV pulse shapes have been measured using calibrated Mo/Si multilayer mirrors and filtered junction diodes. A pinhole camera, equipped with a back illuminated CCD camera, was used to determine the plasma size in a wavelength range from 6 - 16 nm.
A novel method of filtering out atoms and small particulates, emitted from a laser plasma EUV radiation source, has been developed and experimentally characterized. The method consists of elimination of debris species by an optically transparent assembly of foils positioned in a buffer gas environment near the source. A high trapping efficiency is achieved due to retardation and scattering of particles in the gas and subsequent deposition on the foils. The method imposes no limitations of the radiation acceptance angle. The foil trap technique, a debris suppression method universally applicable for different EUVL radiation sources, has been investigated in combination with a fast rotating laser plasma target. A target unit with a disk edge velocity of up to 500 m/s enabling nearly full elimination of large particulates, served as a source of different debris components for experiments on foil trapping atoms and sub-micron particulates. An integrated suppression coefficient of 500 has been measured for debris with sizes of up to a micrometer using a pilot trap cooled down to -90 degrees C. Extrapolation of this data to conditions when debris of sub-micron size only is produced, resulted in a suppression coefficient of 2000.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.