Prof. Henry I. Smith Profile

Prof. Henry I. Smith

Professor of Electrical Engineering at Massachusetts Institute of Technology

SPIE Involvement:

Author

Publications (21)

Proceedings Article | 18 February 2009 Paper

Paper

High speed analog-to-digital conversion with silicon photonics

C. Holzwarth, R. Amatya, M. Araghchini, J. Birge, H. Byun, J. Chen, M. Dahlem, N. DiLello, F. Gan, J. Hoyt, E. Ippen, F. Kärtner, A. Khilo, J. Kim, M. Kim, A. Motamedi, J. Orcutt, M. Park, M. Perrott, M. Popovic, R. Ram, H. Smith, G. Zhou, S. Spector, T. Lyszczarz, M. Geis, D. Lennon, J. Yoon, M. Grein, R. Schulein, S. Frolov, A. Hanjani, J. Shmulovich

Proceedings Volume 7220, 72200B (2009) https://doi.org/10.1117/12.808952

KEYWORDS: Silicon, Waveguides, Modulators, Diodes, Electronics, Germanium, Photodiodes, Femtosecond phenomena, Optical filters, Mode locking

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Proceedings Article | 13 February 2008 Paper

Paper

Strategies for successful realization of strong confinement microphotonic devices

Tymon Barwicz, Milos Popovic, Michael Watts, Peter Rakich, Charles Holzwarth, Franz Kaertner, Erich Ippen, Henry Smith

Proceedings Volume 6898, 68980N (2008) https://doi.org/10.1117/12.765986

KEYWORDS: Polarization, Microrings, Optical filters, Waveguides, Calibration, Lithography, Resonators, Semiconducting wafers, Control systems, Silicon

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Proceedings Article | 13 February 2008 Paper

Paper

Photonic analog-to-digital conversion with electronic-photonic integrated circuits

F. Kärtner, R. Amatya, M. Araghchini, J. Birge, H. Byun, J. Chen, M. Dahlem, N. DiLello, F. Gan, C. Holzwarth, J. Hoyt, E. Ippen, A. Khilo, J. Kim, M. Kim, A. Motamedi, J. Orcutt, M. Park, M. Perrott, M. Popović, R. Ram, H. Smith, G. Zhou, S. Spector, T. Lyszczarz, M. Geis, D. Lennon, J. Yoon, M. Grein, R. Schulein

Proceedings Volume 6898, 689806 (2008) https://doi.org/10.1117/12.767926

KEYWORDS: Silicon, Modulators, Waveguides, Optical filters, Diodes, Germanium, Electronics, Photodetectors, Phase shifts, Photodiodes

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Proceedings Article | 7 February 2008 Paper

Paper

Reconfigurable silicon photonic circuits for telecommunication applications

Tymon Barwicz, Miloš Popovic, Fuwan Gan, Marcus Dahlem, Charles Holzwarth, Peter Rakich, Erich Ippen, Franz Kärtner, Henry Smith

Proceedings Volume 6872, 68720Z (2008) https://doi.org/10.1117/12.772740

KEYWORDS: Waveguides, Silicon, Microrings, Metals, Resonators, Switching, Tunable filters, Reactive ion etching, Optical filters, Silica

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Proceedings Article | 14 February 2007 Paper

Paper

Integrated optical components in silicon for high speed analog-to-digital conversion

S. Spector, T. Lyszczarz, M. Geis, D. Lennon, J. Yoon, M. Grein, R. Schulein, R. Amatya, J. Birge, J. Chen, H. Byun, F. Gan, C. Holzwarth, J. Hoyt, E. Ippen, F. Kärtner, A. Khilo, O. Olubuyide, J. Orcutt, M. Park, M. Perrott, M. Popović, T. Barwicz, M. Dahlem, R. Ram, H. Smith

Proceedings Volume 6477, 64770O (2007) https://doi.org/10.1117/12.705219

KEYWORDS: Silicon, Optical filters, Diodes, Modulators, Waveguides, Electronics, Modulation, Femtosecond phenomena, Resonators, Photodiodes

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Proceedings Article | 1 March 2006 Paper

Paper

Electronic photonic integrated circuits for high speed, high resolution, analog to digital conversion

F. Kärtner, S. Akiyama, G. Barbastathis, T. Barwicz, H. Byun, D. Danielson, F. Gan, F. Grawert, C. Holzwarth, J. Hoyt, E. Ippen, M. Kim, L. Kimerling, J. Liu, J. Michel, O. Olubuyide, J. Orcutt, M. Park, M. Perrott, M. Popovic, P. Rackich, R. Ram, H. Smith, M. Watts

Proceedings Volume 6125, 612503 (2006) https://doi.org/10.1117/12.655762

KEYWORDS: Germanium, Silicon, Modulators, Modulation, Waveguides, Microrings, Analog electronics, Mode locking, Resonators, Diodes

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Proceedings Article | 15 November 2005 Open Access

Open Access

Paper

Enabling nanoscale science and engineering via highly flexible low-cost maskless lithography

Henry Smith, Rajesh Menon, Amil Patel, David Chao, Michael Walsh, G. Barbastathish

Proceedings Volume 6002, 60020B (2005) https://doi.org/10.1117/12.632117

KEYWORDS: Lithography, Electron beam lithography, Zone plates, Maskless lithography, Photons, Nanolithography, Electrons, Silicon, Electronics, Nanoparticles

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Proceedings Article | 25 October 2005 Paper

Paper

Broadband optical studies of 1D and 3D photonic crystals

Peter Rakich, Hideyuki Sotobayashi, Juliet Gopinath, Jason Sickler, Chee Wei Wong, Steven Johnson, Minghao Qi, Elefterios Lidorikis, Henry Smith, John Joannopoulos, Erich Ippen

Proceedings Volume 6017, 601702 (2005) https://doi.org/10.1117/12.631874

KEYWORDS: Photonic crystals, Waveguides, Polarization, Optical microcavities, Supercontinuum sources, 3D metrology, Scanning electron microscopy, Integrated optics, Photonic crystal devices, Polarizers

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Proceedings Article | 16 May 2005 Paper

Paper

The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

Hyun In, William Arora, Paul Stellman, Sundeep Kumar, Shao-Horn Yang, Henry Smith, George Barbastathis

Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.600304

KEYWORDS: Nanolithography, Silicon, Nanostructuring, Etching, Chromium, Optical alignment, Silica, Metals, Fabrication, Semiconducting wafers

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Proceedings Article | 6 May 2005 Paper

Paper

Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning

Rajesh Menon, Amil Patel, David Chao, Michael Walsh, Henry Smith

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598742

KEYWORDS: Photomasks, Lithography, Maskless lithography, Zone plates, Semiconducting wafers, Optical lithography, Modulators, Modulation, Photomicroscopy, Manufacturing

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Proceedings Article | 22 January 2005 Paper

Paper

Maskless optical lithography using MEMS-based spatial light modulators

Rajesh Menon, Amil Patel, Henry Smith

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.593624

KEYWORDS: Zone plates, Lithography, Spatial light modulators, Optical lithography, Semiconducting wafers, Modulators, Photomasks, Modulation, Photomicroscopy, Wafer-level optics

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Proceedings Article | 18 October 2004 Paper

Paper

The Nanostructured Origami 3D fabrication and assembly process

George Barbastathis, Hyun Jin In, Will Arora, Tilman Buchner, Kehan Tian, Henry Smith

Proceedings Volume 5554, (2004) https://doi.org/10.1117/12.562581

KEYWORDS: Nanolithography, Nanostructuring, Silicon, Zone plates, Kinematics, Diffraction, Manufacturing, 3D modeling, Electron beam lithography, Gold

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Proceedings Article | 17 January 2003 Paper

Paper

Zone-plate array lithography (ZPAL): a maskless fast-turnaround system for micro-optic device fabrication

Rajesh Menon, Dario Gil, David Carter, Amil Patel, Henry Smith

Proceedings Volume 4984, (2003) https://doi.org/10.1117/12.477856

KEYWORDS: Zone plates, Lithography, Micro optics, Optics manufacturing, Photomicroscopy, Nanolithography, Semiconducting wafers, Prototyping, Multiplexers, Optical lithography

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Proceedings Article | 24 July 2002 Paper

Paper

The critical role of metrology in nanotechnology

Mark Schattenburg, Henry Smith

Proceedings Volume 4608, (2002) https://doi.org/10.1117/12.437273

KEYWORDS: Metrology, Nanotechnology, Manufacturing, Lithography, Interferometers, Critical dimension metrology, Computer programming, Nanostructures, Semiconducting wafers, Reticles

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Proceedings Article | 1 July 2002 Paper

Paper

High-power laser-plasma x-ray source for lithography

Celestino Gaeta, Harry Rieger, I. C. Edmond Turcu, Richard Forber, Kelly Cassidy, S. Campeau, Michael Powers, J. Maldonado, James Morris, Richard Foster, Henry Smith, M. Lim

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472353

KEYWORDS: X-rays, X-ray sources, X-ray lithography, Plasma, Semiconducting wafers, Collimators, Photomasks, Lithography, Calibration, Copper

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Proceedings Article | 25 June 1999 Paper

Paper

Sub-40-nm pattern replication with +/- 20% process latitude by soft-contact x-ray lithography

David Carter, Henry Smith, Kee Rhee, Christie Marrian

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351076

KEYWORDS: Photomasks, X-rays, X-ray lithography, Nanolithography, Scanning electron microscopy, Image processing, Electrons, Polymethylmethacrylate, Lithography, X-ray imaging

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Proceedings Article | 25 June 1999 Paper

Paper

Zone-plate array lithography (ZPAL): a new maskless approach

David Carter, Dario Gil, Rajesh Menon, Ihsan Djomehri, Henry Smith

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351104

KEYWORDS: Zone plates, X-rays, Modulation, Lithography, Ultraviolet radiation, X-ray lithography, Photons, Diffraction, Manufacturing, Modulation transfer functions

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Proceedings Article | 16 September 1994 Paper

Paper

Fabrication of high-energy x-ray transmission gratings for the Advanced X-ray Astrophysics Facility (AXAF)

Mark Schattenburg, Richard Aucoin, Robert Fleming, Irving Plotnik, Jeanne Porter, Henry Smith

Proceedings Volume 2280, (1994) https://doi.org/10.1117/12.186810

KEYWORDS: Lithography, Gold, X-rays, Etching, Plating, Spectroscopy, X-ray lithography, Photomasks, Semiconducting wafers, Reactive ion etching

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Proceedings Article | 28 July 1994 Paper

Paper

Limitations and solutions for the use of integrated Lambda/4-Shifted distributed Bragg resonators in wavelength-division multiplexing applications

Jay Damask, J. Ferrera, Vincent Wong, Henry Smith, Hermann Haus

Proceedings Volume 2213, (1994) https://doi.org/10.1117/12.180956

KEYWORDS: Resonators, Electron beam lithography, Optical filters, Tolerancing, Fiber Bragg gratings, Wavelength division multiplexing, Lithography, Reflectivity, Waveguides, Multiplexing

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Proceedings Article | 9 July 1992 Paper

Paper

Why bother with x-ray lithography?

Henry Smith, Mark Schattenburg

Proceedings Volume 1671, (1992) https://doi.org/10.1117/12.136013

KEYWORDS: Photomasks, X-ray lithography, Optical lithography, Manufacturing, X-rays, Distortion, Lithography, Synchrotrons, Semiconducting wafers, Electrons

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SPIE Journal Paper | 1 October 1991

Transmission grating spectroscopy and the Advanced X-Ray Astrophysics Facility

Mark Schattenburg, Claude Canizares, Daniel Dewey, Kathryn Flanagan, Margaret Hamnett, Alan Levine, Kenneth Lum, Ramanujam Manikkalingam, Thomas Markert, Henry Smith

OE, Vol. 30, Issue 10, (October 1991) https://doi.org/10.1117/12.10.1117/12.55976

KEYWORDS: X-rays, Photomasks, Diffraction gratings, Gold, Spectrometers, Spectral resolution, Sensors, Astrophysics, Space telescopes, X-ray telescopes

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Showing 5 of 21 publications

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