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Henry H. Yang
Senior Staff Engineer at Seagate Technology LLC
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Publications (2)
SPIE Journal Paper | 13 September 2012
Cleaning induced imprint template erosion
SherJang Singh, Zhaoning Yu, Nobuo Kurataka, Gene Gauzner, Hongying Wang, Henry Yang, Yautzong Hsu, Kim Lee, David Kuo, Tobias Wähler, Peter Dress
JM3, Vol. 11, Issue 3, 031407, (September 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.3.031407
KEYWORDS: Scanning probe microscopy, Beam propagation method, Contamination, Scanning electron microscopy, Silica, Inspection, Nanoimprint lithography, Hydrogen, Particles, Critical dimension metrology
Proceedings Article | 21 March 2012 Paper
Controlling template erosion with advanced cleaning methods
SherJang Singh, Zhaoning Yu, Tobias Wähler, Nobuo Kurataka, Gene Gauzner, Hongying Wang, Henry Yang, Yautzong Hsu, Kim Lee, David Kuo, Peter Dress
Proceedings Volume 8323, 832317 (2012) https://doi.org/10.1117/12.916294
KEYWORDS: Scanning probe microscopy, Beam propagation method, Contamination, Silica, Scanning electron microscopy, Critical dimension metrology, Nanoimprint lithography, Particles, Inspection, Image analysis
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