Mr. Hideaki Kawashima Profile

Hideaki Kawashima

Section Manager and Sales Representative at Hakuto Co Ltd

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Author

Publications (3)

Proceedings Article | 14 November 2007 Paper

Mask protection from a haze during shipping and storage

T. Umeda, H. Kawashima, T. Miho, K. Moriya

Proceedings Volume 6730, 67304Q (2007) https://doi.org/10.1117/12.746358

KEYWORDS: Air contamination, Polymethylmethacrylate, Neodymium, Photomasks, Polymers, Carbon, Ions, Chemical analysis, Particle filters, Composites

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Proceedings Article | 9 November 2005 Paper

A comprehensive reticle handling and storage approach for optimized fab yields

Atsushi Nobe, Hideaki Kawashima, Akinori Kurikawa, Hisashi Kasahara, Fumiko Ohta, Yasushi Okubo

Proceedings Volume 5992, 59924B (2005) https://doi.org/10.1117/12.632556

KEYWORDS: Reticles, Particles, Photomasks, Data storage, Contamination, Optical properties, Inspection, Polymethylmethacrylate, Adhesives, Air contamination

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Proceedings Article | 28 June 2005 Paper

Comprehensive reticle handling and storage approach for optimized fab yields

Toshiya Umeda, Hideaki Kawashima

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617128

KEYWORDS: Reticles, Particles, Photomasks, Contamination, Inspection, Scanners, Glasses, Air contamination, Polymers, Adhesives

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