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SCExAO, an instrument with a dual purpose: perform cutting-edge science and develop new technologies
ELID grinding method is the new grinding technology which one of authors invented, produces the quality of the high surface efficiently, and is effective in processing of a very hard material, such as crystalline silicon and sapphire, ceramics, glasses, hard metals and so on. SiC mirror for space telescope is designed as regular polygon rib structures in the rear face for reducing weight, and both the optical face and the backside ribs are so thin that deformation of the mirror cannot disregard. Therefore, in order to feed back deformation of the mirror to the orbit of grinding wheel, it is necessary to analyze deformation.
In this research, we present the results which fabricated mirrors of sintered SiC by the ELID grinding method, the numerical calculation results of the profile deformations analyzed by FEM, and new jig for Φ360mm a mirror.
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