Dr. Hiroshi Yanagita Profile

Dr. Hiroshi Yanagita

at Merck Electronics Ltd

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Publications (3)

Proceedings Article | 1 May 2023 Presentation + Paper

The novel materials for pattern growing on EUV resists

Hiroshi Yanagita, Kazuma Yamamoto

Proceedings Volume 12498, 124981C (2023) https://doi.org/10.1117/12.2657969

KEYWORDS: Photoresist processing, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Film thickness, Scanning electron microscopy, High volume manufacturing, Tunable filters, Optical lithography, Line width roughness

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Proceedings Article | 1 December 2022 Poster + Paper

Study on rinse material for pattern collapse mitigation in EUV lithography

Kazuma Yamamoto, Hiroshi Yanagita, Maki Ishii, Miho Yamaguchi, Rikio Kozaki

Proceedings Volume 12292, 122920T (2022) https://doi.org/10.1117/12.2643712

KEYWORDS: Capillaries, Extreme ultraviolet lithography, Critical dimension metrology, Lithography, Photoresist processing, Materials processing, Extreme ultraviolet, Coating

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Proceedings Article | 27 March 2014 Paper

A chemical underlayer approach to mitigate shot noise in EUV contact hole patterning

Jin Li, Ide Yasuaki, Shigemasa Nakasugi, Motoki Misumi, Hiroshi Yanagita, Fumihiro Suzuki, Georg Pawlowski, JoonYeon Cho, Huirong Yao, Takanori Kudo, Munirathna Padmanaban, YoungJun Her, Yi Cao

Proceedings Volume 9051, 905117 (2014) https://doi.org/10.1117/12.2046237

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Photons, Electrons, Optical lithography, Lithography, Printing, Polymers, Photomasks, Absorbance

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