KEYWORDS: Waveguides, Resonators, Near field optics, Motion detection, Integrated optics, Photodetectors, Silicon, Signal detection, Evanescent wave coupling, Sensing systems
A central problem in the development of mechanical devices and systems is accurate and fast motion sensing. We
demonstrate an integrated and near-field optical displacement sensing technique based on optical evanescent wave
coupling. Exploiting the strong dependence of waveguide-to-waveguide coupling to changes in separation between
waveguides we were able to detect in- and out-of-plane mechanical motions of a mechanical resonator. We have studied
the sensitivity of the proposed motion detection technique with a 3D full-vectorial mode solver and make predictions on
the attainable displacement detection limits based on a noise analysis. This work demonstrates both the feasibility and
the effectiveness of integrating nanomechanical devices with photonic circuitry.
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