Mr. Jeongsu Park Profile

Jeongsu Park

at SK Hynix Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 20 March 2020 Paper

On-product focus monitoring and control for immersion lithography in 3D-NAND manufacturing

Amine Lakcher, Ahmed Zayed, Jennifer Shumway, Jan-Pieter van Delft, Gratiela Isai, Ruxandra Mustata, Arno van den Brink, Taeddy Kim, Jay Jung, Yong-Sik Shin, Soo-Kyung Lee, Paul Böcker, Mohamed El Kodadi, Geert Vinken, ChanHa Park, Sangjun Han, Jeongsu Park, Beomki Shin, Gunwoong Lee

Proceedings Volume 11325, 1132521 (2020) https://doi.org/10.1117/12.2552930

KEYWORDS: Semiconducting wafers, Metrology, Scanners, Immersion lithography, Critical dimension metrology, Lithography, Lithographic process control

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Proceedings Article | 27 March 2017 Paper

Factors analysis on the physical properties of the low-temperature SOC of memory cell characteristics

Doyoung Kwak, Jaeyeol Kim, Jihoon Park, Jeonqsu Park, Sungkoo Lee, Seomin Kim, Taewoo Jung, Hyeongsoo Kim

Proceedings Volume 10146, 1014627 (2017) https://doi.org/10.1117/12.2257983

KEYWORDS: Etching, System on a chip, Process control, Factor analysis, Semiconductors, Tolerancing, Semiconducting wafers, Photoresist processing, Optical lithography, Plasma, Inspection

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Proceedings Article | 18 March 2016 Paper

Investigation on the relationship between CD and CDU in memory devices

Jeongsu Park, Daewoo Kim, Keunjun Kim, Choidong Kim, Sungkoo Lee, Hyeongsoo Kim

Proceedings Volume 9778, 97782T (2016) https://doi.org/10.1117/12.2219569

KEYWORDS: Critical dimension metrology, Control systems, Resistance, Metrology, Inspection, Nanoimprint lithography, Photomasks, Semiconducting wafers, Line edge roughness, Electroluminescence, Image compression

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