Mr. Jin-Tae Park Profile

Jin-Tae Park

at ASML Korea Co Ltd

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Publications (1)

Proceedings Article | 13 March 2018 Paper

Improved control of multi-layer overlay in advanced 8nm logic nodes

Tae-Sun Kim, Young-Sik Park, Yong-Chul Kim, Byoung-Hoon Kim, Ji-Hun Lee, Min-Keun Kwak, Sung-Won Choi, Joon-Soo Park, Hong-Cheon Yang, Philipp Meixner, Dong-jin Lee, Oh-Sung Kwon, Hyun-Su Kim, Jin-Tae Park, Sung-Min Lee, Cedric Grouwstra, Vidar van der Meijden, Mohamed El Kodadi, Chris Kim, Pierre-Yves Guittet, Tjitte Nooitgedagt

Proceedings Volume 10585, 1058527 (2018) https://doi.org/10.1117/12.2297099

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Overlay metrology, Logic, Metrology, Diffraction, Target acquisition, Performance modeling, Diffraction gratings

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