Jincheng Pei
at KLA China
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 26 May 2022 Presentation + Paper
Chieh-Chen Chiu, Mingqi Gao, Feng Tian, Wei Feng, Andy Lan, Dan Li, Shengyuan Zhong, Aijiao Zhu, Ningqi Zhu, Yunchen Xu, Jin Zhu, Jincheng Pei, Kevin Huang
Proceedings Volume 12053, 120530U (2022) https://doi.org/10.1117/12.2627284
KEYWORDS: Semiconducting wafers, Contamination, Scanners, Data processing, Statistical analysis, Detection and tracking algorithms, Optical lithography, Lithography, Data analysis

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Chao-Jen Tsou, Shengyuan Zhong, Norman Birnstein, Robin Maximilian Zech, Clemens Utzny, Jin Zhu, Jincheng Pei, Kevin Huang
Proceedings Volume 12053, 1205329 (2022) https://doi.org/10.1117/12.2627283
KEYWORDS: Optical alignment, Optimization (mathematics), Scanners, Semiconducting wafers, Overlay metrology, Data modeling, Performance modeling, Semiconductors

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Proceedings Volume 12053, 1205319 (2022) https://doi.org/10.1117/12.2614375
KEYWORDS: Optical alignment, Semiconducting wafers, Scanners, Overlay metrology, Optimization (mathematics), Computer simulations, Performance modeling, Device simulation, Data modeling

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Aijiao Zhu, Ningqi Zhu, Dan Li, Jin Zhu, Jincheng Pei, Kevin Huang
Proceedings Volume 12053, 1205318 (2022) https://doi.org/10.1117/12.2614372
KEYWORDS: Scanners, Optical parametric oscillators, Semiconducting wafers, Reticles, Performance modeling, Optical lithography, Switching, Manufacturing, Lithography

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Proceedings Volume 12053, 120531I (2022) https://doi.org/10.1117/12.2617698
KEYWORDS: Optical alignment, Optical parametric oscillators, Overlay metrology, Manufacturing, Feedback control, Calibration, Scanners, Process modeling, Performance modeling, Model-based design

Showing 5 of 9 publications
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