Optical materials and lens assemblies are specified for use at various operating temperatures. Ophthalmic lenses such as intra-ocular (IOLs), rigid gas permeable (RGP), and soft contact lenses must be verified at a single well-controlled temperature to ensure correct performance. In comparison, lens assemblies for UAVs (unmanned aerial vehicles) and other “outdoor” applications demand performance over a substantial range of temperatures. Both applications demand the ability to integrate temperature monitoring or control with optical measuring instruments. A common practice is to thermally soak the material or lens assembly and then attempt measurement before the object under evaluation returns to ambient room temperature. We are reporting on the utilization of a NIST-traceable temperature device combined with wavefront sensing technology for faster integrated measurement capability. The temperature sensor is currently capable of 0.01 and 0.1 degree C resolution and accuracy; respectively for an operating range of 0 to 100 degrees C. Efforts are underway to extend the temperature measurement range down to -30 C. The wavefront measurement device is a Shack- Hartmann sensor (SHS) operating at 5 to 15 Hz with simultaneous gauging of temperature. The SHS can be operated with a choice of wavelengths from 400 to 1,000 nm. It also supports both single and double-pass configurations. The single-pass arrangement was chosen for these experiments due to the simpler, more compact set-up. The dynamic range of the wavefront sensor is first utilized to evaluate the temperature chamber. Results are then presented for two lens assemblies intended for commercial UAVs.
The measurement of radius of curvature through the use of an interferometer can be a very accurate way to understand the properties of an optical surface. This process is completed by observing the distance between the cat's eye and confocal points of an optical piece. This type of measurement process, however, can include a number of errors if not executed properly. This paper presents and explains the major sources of mechanical errors that exist for radius of curvature measurements. The major mechanical errors that may occur are Abbe, cosine, and null cavity error. These errors are presented in a fashion such that they may be easily understood by someone who may not have an extensive optics background. Also, some techniques to test for and assess these errors will be displayed. In order to make extremely accurate measurements, on the order of a nanometer, one must greatly diminish the mechanical errors of a system before examining the effects of environmental errors.
Tropel has developed a new instrument for the measurement of next generation photomasks. The instrument is capable of measuring the flatness of rough lapped, fine lapped and polished mask blanks with better than 0.1 micrometer accuracy. Well suited to production control and process development, the instrument utilizes a non-contact method to perform complete surface evaluation in less than 1 minute. The fundamental measurement technique is grazing-incidence interferometry. A novel optical design suppresses interference fringes from unwanted second surface reflections. This is a significant advantage over normal- incidence interferometers that typically require photomasks to be temporarily coated to address second surface interference effects. Coating and subsequent cleaning may damage polished photomasks as well as add unnecessary process steps.
Phase measuring interferometry is well established as the premier measurement technology in support of optical component fabrication. Commercial instruments are available that provide surface measurements over a range of radii and diameters. However, microlithographic lenses have increased in complexity and scale to the point that most commercial instruments fail to provide adequate surface coverage. Most severe is the ability to measure large diameter, convex surfaces. Anticipating the demands of today's microlithographic lens production, Tropel began design and construction of a new class of phase measuring interferometers in 1990. As a catadioptric design, these instruments feature a large spherical mirror to accomplish their purpose. This paper reviews the optical design of the large aperture reflective interferometer (LARI), and various considerations in their construction.
Conference Committee Involvement (13)
Optifab 2023
16 October 2023 | Rochester, New York, United States
Optifab 2021
18 October 2021 | Rochester, New York, United States
Optifab 2019
14 October 2019 | Rochester, New York, United States
Optifab 2017
16 October 2017 | Rochester, New York, United States
Optifab 2015
12 October 2015 | Rochester, New York, United States
Optifab 2013
14 October 2013 | Rochester, New York, United States
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