Mr. Jong Hun Oh Profile

Jong Hun Oh

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 13 March 2018 Presentation + Paper

Scanner focus metrology and control system for advanced 10nm logic node

Junghun Oh, Kwang-Seok Maeng , Jae-Hyung Shin, Won-Woong Choi, Sung-Keun Won, Cedric Grouwstra, Mohamed El Kodadi, Stephan Heil, Vidar van der Meijden, Jong Kyun Hong , Sang-Jin Kim, Oh-Sung Kwon

Proceedings Volume 10585, 105851O (2018) https://doi.org/10.1117/12.2297442

KEYWORDS: Scanners, Semiconducting wafers, Metrology, Control systems, Interfaces, Logic, Critical dimension metrology, Lithography, High volume manufacturing, Environmental monitoring

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Proceedings Article | 8 March 2016 Paper

Reducing overlay sampling for APC-based correction per exposure by replacing measured data with computational prediction

Ben Noyes, Babak Mokaberi, Jong Hun Oh, Hyun Sik Kim, Jun Ha Sung, Marc Kea

Proceedings Volume 9778, 977832 (2016) https://doi.org/10.1117/12.2219241

KEYWORDS: Overlay metrology, Metrology, Data modeling, Computing systems, Time metrology, Semiconductors, Lithium, Semiconducting wafers, Lithography, Systems modeling

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