Mr. Joshua Lessing Profile

Joshua Lessing

Laser Application Engineer

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Author

Publications (9)

Proceedings Article | 17 December 2003 Paper

Advancements in focused ion beam repair of alternating phase-shift masks

Joshua Lessing, Tod Robinson, Troy Morrision, Theresa Holtermann

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518319

KEYWORDS: Quartz, Etching, Ion beams, Reticles, Photomasks, Phase shifts, Transmittance, Atomic force microscopy, Ions, Resolution enhancement technologies

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Proceedings Article | 28 August 2003 Paper

New advancements in focused ion beam repair of alternating phase-shift masks

Joshua Lessing, Tod Robinson, Rey Brannen, Troy Morrison, Theresa Holtermann

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504211

KEYWORDS: Quartz, Etching, Ion beams, Photomasks, Reticles, Phase shifts, Atomic force microscopy, Transmittance, Ions, Resolution enhancement technologies

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Proceedings Article | 11 March 2002 Paper

Repair and imaging of 193-nm MoSiON phase-shift photomasks

Chris Marotta, Joshua Lessing, Jeff Marshman, Marcus Ramstein

Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458283

KEYWORDS: Photomasks, Ion beams, Opacity, Phase shifts, Quartz, Transmittance, Carbon, Scanning electron microscopy, Molybdenum, Atomic force microscopy

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Proceedings Article | 30 December 1999 Paper

Repair and printability study of binary chrome masks with OPC features for 0.18-um technology node

Diane Stewart, David Ferranti, John Morgan, Joshua Lessing, Jeff Kuo, Ching Chiu

Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373359

KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Quartz, Gallium, Opacity, Binary data, Etching, Cadmium, Printing

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Proceedings Article | 25 August 1999 Paper

Advancements in focused ion beam repair of MoSiON phase-shifting masks

Joshua Lessing, David Ferranti, Ganesh Sundaram, Ludwig Nagal, Martin Verbeek

Proceedings Volume 3748, (1999) https://doi.org/10.1117/12.360232

KEYWORDS: Photomasks, Opacity, Etching, Ion beams, Phase shifts, Quartz, Critical dimension metrology, Deep ultraviolet, Sputter deposition, Atomic force microscopy

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Proceedings Article | 12 February 1997 Paper

Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology

Mark Raphaelian, Don Carolan, J. David Casey, Andrew Doyle, M. Ellis, David Ferranti, Joshua Lessing, K. Rose, Diane Stewart, Roy White

Proceedings Volume 3236, (1997) https://doi.org/10.1117/12.301220

KEYWORDS: Photomasks, Opacity, Carbon, Calibration, Ion beams, Statistical analysis, Standards development, Semiconducting wafers, Phase shifting, Phase shifts

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Proceedings Article | 16 September 1994 Paper

Soft x-ray quantum efficiency of microchannel plates with CsI and KBr photocathodes

Vincent Rose, Kathryn Flanagan, Joshua Lessing, D. Kearns, Stephen Murray, Rachel Roll, Martin Zombeck

Proceedings Volume 2280, (1994) https://doi.org/10.1117/12.186835

KEYWORDS: Quantum efficiency, Microchannel plates, X-rays, Sensors, Aluminum, Telescopes, Absorption, Astrophysics, Data modeling, Spatial resolution

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Proceedings Article | 16 December 1993 Paper

Long-term photocathode stability for microchannel plates in vacuum

Kathryn Flanagan, G. Germaine, Joaquim Gomes, D. Kearns, Joshua Lessing, Randall Moore, Stephen Murray, Rachel Roll, A. Viola, Martin Zombeck

Proceedings Volume 2009, (1993) https://doi.org/10.1117/12.164747

KEYWORDS: Sensors, Microchannel plates, Quantum efficiency, Nitrogen, X-ray detectors, X-rays, Coating, Imaging spectroscopy, Image sensors, Physics

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Proceedings Article | 16 December 1993 Paper

MCP readout for the AXAF-I grating spectrometer

Almus Kenter, Richard Goddard, Joaquim Gomes, Joshua Lessing, Stephen Murray, Randall Moore, Rachel Roll, M. Valenza, Martin Zombeck

Proceedings Volume 2009, (1993) https://doi.org/10.1117/12.164748

KEYWORDS: Sensors, Microchannel plates, Prototyping, X-rays, Image resolution, Spectroscopy, Spatial resolution, Electrodes, Amplifiers, Solids

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Showing 5 of 9 publications

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