The main aim of the paper is to prepare a nonporous aluminum oxide membrane which will be used as a micro/Nano filter in biomedical micro hydraulic device or system by using piezoelectric material actuator acting as a vibroactive member to excite the aluminum oxide membrane. In order to identify the aluminum oxide membrane could be used as active nano filter for filtration of any kind of particle membrane was excited at frequency range of 5 kHz to 100 kHz and the distribution of vibration on the membrane was presented in the paper. On the other hand, it is shown that this type of membrane could be used as a particle separation of fluid separation in the micro hydraulic devices in biomedical. Analysis of transportation of bioparticles through the membrane filter were analyzed using developed coherent optics principles.
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