KEYWORDS: 3D displays, Micromirrors, Defense and security, Eye, 3D image processing, Defense systems, 3D vision, Visualization, Optical fabrication, Cameras
We report the design, fabrication, and test of a micromirror-based 3D display system. This real-time and full-color 3D display system has left and right eye views in the forms of both still and motion 3-D scenes, and the viewers were able to fuse the stereo information. Furthermore, we report the design concepts for defense applications of this 3D display system.
We discuss magnetic actuation for Microvision’s bi-axial scanners for retinal scanning displays. Compared to the common side-magnet and moving-coil approach, we have designed, assembled and tested a novel magnet configuration, with magnets above and below the moving coil. This design reduces the magnet sizes significantly without sacrificing performance, and opens further improvement paths as well.
We designed and fabricated the first, to the best of our knowledge, micromirror array for autostereoscopic 3D display systems. We conducted the optical and Micro-Electrical- Mechanical-System (MEMS) design concurrently, and fabricated several 20x20 micromirror arrays, with micromirror size of 460x460 microns. Both electrostatic and magnetic actuation methods were used to achieve deflection angles of +/- 0.8 degrees. We used these micromirror arrays with backlit transparencies to build a 2-view (left and right) autostereoscopic 3-D display system.
In this work, a scanning silicon micromirror using a bi- directionally movable magnetic microactuator is designed, fabricated and characterized. Although there have been technical difficulties in realizing bi-directional motion in magnetic MOEMS devices for the lack of a suitable structuring technique for permanent magnet components, we overcome those by using UV-LIGA process of thick CONiMnP alloy films and arrays. Based on this new fabrication technique, hard magnetic films or arrays are directly electroplated on silicon cantilever beams in order to compose moving mirror parts. A micromirror is constructed by combining the beam with an electromagnet. According to the change of current in electromagnets, the micromirrors are deflected either upward or downward depending on the direction of magnetic field generated by the electromagnets. Optical properties of the scanning mirrors are measured by a He-Ne laser beam source with the wavelength of 632.8 nm and an optical power detector. A prototype scanning micromirror shows +/- 60 micrometers deflections at the current of +/- 100 mA. The Gaussian profile of the laser beam is well preserved. The reflectance is above 98 percent for the mirrors coated with aluminum films.
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