Ms. Junko Katayama Profile

Junko Katayama

Researcher at Kansai Research Institute Inc

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Publications (1)

Proceedings Article | 24 March 2006 Paper

Organic-inorganic hybrid materials for nanoimprint lithography

Junko Katayama, Shigeru Yamaki, Masahiro Mitsuyama, Makoto Hanabata

Proceedings Volume 6151, 61512F (2006) https://doi.org/10.1117/12.655053

KEYWORDS: Glasses, Silica, Ultraviolet radiation, Nanoimprint lithography, Particles, Nanoparticles, Organic hybrid materials, Refractive index, Statistical analysis, Polymers

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