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Kang Du
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Publications (1)
Proceedings Article | 13 October 2010 Paper
Research of electromagnetic drive micromechanical gyroscope based on tunneling effect of multi-barrier nano thin films
Kang Du, Ruirong Wang, Mengwei Li, Jun Liu, Yunbo Shi
Proceedings Volume 7659, 765916 (2010) https://doi.org/10.1117/12.865461
KEYWORDS: Gyroscopes, Gallium arsenide, Electromagnetism, Nanostructured thin films, Sensors, Thin film devices, Image processing, Silicon, Molecular beam epitaxy, Surface micromachining
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