Prof. Kaoru Ohya Profile

Prof. Kaoru Ohya

Professor at Tokushima University

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Author

Publications (5)

Proceedings Article | 28 March 2017 Presentation + Paper

Molecular dynamics and dynamic Monte-Carlo simulation of irradiation damage with focused ion beams

Kaoru Ohya

Proceedings Volume 10145, 101451V (2017) https://doi.org/10.1117/12.2256624

KEYWORDS: Monte Carlo methods, Ion beams, Extreme ultraviolet lithography, Sputter deposition, Microscopy, Nanostructuring, Ions, Silicon, Gallium, Neon, Crystals, Molybdenum, Selenium

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Proceedings Article | 24 March 2016 Paper

Identification of multilayer structures using secondary electron yield curves: effect of native oxide films on EUV-patterned mask inspection

Susumu Iida, Kaoru Ohya, Ryoichi Hirano, Hidehiro Watanabe

Proceedings Volume 9778, 977817 (2016) https://doi.org/10.1117/12.2218944

KEYWORDS: Oxides, Ruthenium, Metals, Contamination, Inspection, Metrology, Monte Carlo methods, Crystals, Multilayers, Extreme ultraviolet, Defect detection, Photomasks, Selenium, Image quality

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Proceedings Article | 3 June 2010 Paper

Modeling of charging effects in scanning ion microscopes

Kaoru Ohya, Takuya Yamanaka, Daiki Takami, Kensuke Inai

Proceedings Volume 7729, 77290V (2010) https://doi.org/10.1117/12.853488

KEYWORDS: Ions, Selenium, Silica, Gallium, Chemical species, Monte Carlo methods, Particles, Scanning electron microscopy, Microscopes, Ion beams

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Proceedings Article | 24 March 2009 Paper

Simulation of secondary electron emission in helium ion microscope for overcut and undercut line-edge patterns

Takuya Yamanaka, Kensuke Inai, Kaoru Ohya, Tohru Ishitani

Proceedings Volume 7272, 72722L (2009) https://doi.org/10.1117/12.813889

KEYWORDS: Ions, Gallium, Selenium, Silicon, Ion beams, Electron beams, Monte Carlo methods, Scanning electron microscopy, Helium, Scanning helium ion microscopy

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Proceedings Article | 4 December 2008 Paper

Electron beam charging of a SiO2 layer on Si: a comparison between Monte Carlo-simulated and experimental results

Kensuke Inai, Kaoru Ohya, Hideaki Kuwada, Ryosuke Kawasaki, Misako Saito, Kaoru Fujihara, Teruyuki Hayashi, Jack Jau, Kenichi Kanai

Proceedings Volume 7140, 71400X (2008) https://doi.org/10.1117/12.804461

KEYWORDS: Silica, Silicon, Selenium, Scanning electron microscopy, Monte Carlo methods, Defect inspection, Electron beams, Electron transport, Particles, Defect detection

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