Dr. Kestutis Grigoras Profile

Dr. Kestutis Grigoras

Senior Scientist at VTT Technical Research Ctr of Finland Ltd

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Publications (11)

Proceedings Article | 26 February 2020 Paper

High-performance infrared thermoelectric bolometers based on nanomembranes

Aapo Varpula, Kirsi Tappura, Jonna Tiira, Kestutis Grigoras, Kai Viherkanto, Jouni Ahopelto, Mika Prunnila

Proceedings Volume 11289, 112891O (2020) https://doi.org/10.1117/12.2542194

KEYWORDS: Thermoelectric materials, Bolometers, Absorption, Thermography, Sensors, Silicon, Infrared bolometers, Data modeling, Reflectors, Metals

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Proceedings Article | 30 May 2017 Paper

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Kestutis Grigoras, Leif Grönberg, Jouni Ahopelto, Mika Prunnila

Proceedings Volume 10246, 102460Z (2017) https://doi.org/10.1117/12.2266603

KEYWORDS: Electrochemical etching, Coating, Picosecond phenomena, Scanning electron microscopy, Resistance, Fabrication, Silicon, Electrodes, Capacitance, Atomic layer deposition, Capacitors

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Proceedings Article | 30 May 2017 Paper

Thermoelectric bolometers based on silicon membranes

Aapo Varpula, Andrey Timofeev, Andrey Shchepetov, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila

Proceedings Volume 10246, 102460L (2017) https://doi.org/10.1117/12.2266554

KEYWORDS: Bolometers, Silicon, Long wavelength infrared, Thermoelectric materials, Sensors, Infrared bolometers, Infrared imaging, Thermography, Infrared radiation, Microopto electromechanical systems, Infrared detection, Imaging systems, Photodetectors, Infrared sensors

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Proceedings Article | 25 October 2012 Paper

Non-destructive 3D characterization of microchannels

Ville Heikkinen, Anton Nolvi, Ivan Kassamakov, Kestutis Grigoras, Sami Franssila, Edward Hæggström

Proceedings Volume 8466, 84660R (2012) https://doi.org/10.1117/12.930080

KEYWORDS: Glasses, Silicon, Semiconducting wafers, Oxides, Microfluidics, Photoresist materials, Photomasks, Nondestructive evaluation, 3D metrology, Imaging devices

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Proceedings Article | 15 February 2012 Paper

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggström

Proceedings Volume 8250, 825008 (2012) https://doi.org/10.1117/12.906178

KEYWORDS: Bridges, Light emitting diodes, Light sources, Microelectromechanical systems, 3D metrology, Optical testing, Visible radiation, Silicon, Optical interferometry, Lamps

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Proceedings Article | 27 May 2011 Paper

Hybrid light source for scanning white light interferometry-based MEMS quality control

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, H. Räikkönen, B. Wälchli, T. Paulin, I. Kassamakov, K. Grigoras, S. Franssila, E. Hæggström

Proceedings Volume 8082, 80822O (2011) https://doi.org/10.1117/12.889362

KEYWORDS: Light sources, Light emitting diodes, Light, Microelectromechanical systems, Halogens, Optical testing, Interferometry, Fluorescent materials, Lamps, Silicon

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Proceedings Article | 26 February 2011 Paper

Infrared scanning white light interferometry using a solid state light source

V. Heikkinen, J. Aaltonen, B. Wälchli, H. Räikkönen, I. Kassamakov, T. Cholakova, K. Grigoras, S. Franssila, R. Kakanakov, E. Hæggström

Proceedings Volume 7928, 792809 (2011) https://doi.org/10.1117/12.874966

KEYWORDS: Light sources, Light emitting diodes, Cameras, Silicon, Optical testing, Light, Infrared cameras, Optical interferometry, Ocean optics, Infrared radiation

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Proceedings Article | 17 June 2009 Paper

Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices

Kalle Hanhijärvi, Juha Aaltonen, Ivan Kassamakov, Lauri Sainiemi, Kestutis Grigoras, Sami Franssila, Edward Hæggström

Proceedings Volume 7389, 73892Z (2009) https://doi.org/10.1117/12.827522

KEYWORDS: Bridges, Optical flow, Microelectromechanical systems, Oxides, Molecular bridges, Semiconducting wafers, Interferometry, Phase measurement, Etching, Silica

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Proceedings Article | 28 April 2008 Paper

Effect of LED spectral shift on vertical resolution in stroboscopic white light interferometry

Kalle Hanhijärvi, Juha Aaltonen, Ivan Kassamakov, Kestutis Grigoras, Lauri Sainiemi, Sami Franssila, Edward Hæggström

Proceedings Volume 7003, 70031S (2008) https://doi.org/10.1117/12.780972

KEYWORDS: Light emitting diodes, Light sources, Bridges, Optical interferometry, Microelectromechanical systems, Sensors, Semiconducting wafers, Phase shifts, Spectral resolution, CCD cameras

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Proceedings Article | 10 April 2000 Paper

Surface investigation of porous GaAs used for luminescent films

Valentinas Snitka, I. Simkiene, K. Grigoras, Vytautas Jasutis, Kestutis Naudzius, Vaidas Pacebutas, J. Sabataityte, Vida Mizariene

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382323

KEYWORDS: Gallium arsenide, Luminescence, Etching, Chemical analysis, Arsenic, Oxides, Infrared radiation, Crystals, Atomic force microscopy, Argon ion lasers

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Proceedings Article | 6 November 1998 Paper

Porous silicon application in solar cell technology

K. Grigoras, Arunas Krotkus, Vaidas Pacebutas, I. Simkiene

Proceedings Volume 3580, (1998) https://doi.org/10.1117/12.330450

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Showing 5 of 11 publications

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