CONFERENCE PROCEEDINGS
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Dr. Kevin Gao
at HMI
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 26 May 2022 Presentation + Paper
Ultra-high throughput e-beam inspection for DRAM high aspect ratio storage node defect detection
Tsewen Huang, Shueming Chen, Kevin Hsiao, Steve Lin, Ray Fei, Yufei Duan, Kevin Gao, Luke Lin, Selena Chen
Proceedings Volume 12053, 120530J (2022) https://doi.org/10.1117/12.2617685
KEYWORDS: Defect detection, Inspection, Transmission electron microscopy, Signal detection, Sensors, Semiconducting wafers, Scanning electron microscopy, Defect inspection, Data storage
Proceedings Article | 22 February 2021 Presentation + Paper
Stochastic defect criticality prediction enabled by physical stochastic modeling and massive metrology
ChangAn Wang, Peigen Cao, Maxence Delorme, Jen-Yi Wuu, Jiyou Fu, Fuming Wang, Bob Lin, Yiqiong Zhao, Yi-Hsing Peng, Yongfa Fan, Mu Feng, Bin Cheng, Jen-Shiang Wang, Mark Simmoms, Stefan Hunsche, Oliver Patterson, Kuo-Feng Pao, Abdalmohsen Elmalk, Kevin Gao, Ruochong Fei, Xuefeng Zeng, Xiaolong Zhang
Proceedings Volume 11609, 1160916 (2021) https://doi.org/10.1117/12.2584767
KEYWORDS: Stochastic processes, Pattern recognition, Semiconducting wafers, Wafer inspection, Inspection, Defect detection, Metrology, Failure analysis, Data modeling, Calibration
Proceedings Article | 18 October 2018 Presentation + Paper
E-beam based EUV mask characterization for studying mask induced wafer effects
Proceedings Volume 10810, 108100U (2018) https://doi.org/10.1117/12.2502588
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Liquid phase epitaxy, Extreme ultraviolet, Metrology, Cadmium sulfide, Nanoimprint lithography, Inspection, Error analysis
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