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Dr. Khalid Elsayed
at Nearfield Instruments
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Author
Publications (3)
Proceedings Article | 10 April 2024 Poster
Validation of non-destructive 3D probe-based metrology for EUV lithography
Proceedings Volume 12955, 1295531 (2024) https://doi.org/10.1117/12.3010719
KEYWORDS: Extreme ultraviolet lithography, Metrology, 3D metrology, Nondestructive evaluation, Line width roughness, Atomic force microscopy, Surface roughness, Photoresist materials, Line edge roughness, Algorithm development
Proceedings Article | 10 April 2024 Poster + Paper
Feature identification for parameter extraction and defect detection using machine learning
Y. Guo, H. Pahlavani, A. Khachaturiants, K. Elsayed, J. van de Laar, E. Simons, N. Saikumar, H. Sadeghian
Proceedings Volume 12955, 129553I (2024) https://doi.org/10.1117/12.3011237
KEYWORDS: Scanning probe microscopy, Image processing, Education and training, Image segmentation, Algorithm development, Defect detection, Metrology, Feature extraction, Machine learning, Defect inspection
Proceedings Article | 10 April 2024 Poster + Paper
Image resolution enhancement for advanced semiconductor nodes
L. Rencker, O. Tajalizadehkhoob, K. Elsayed, A. Khachaturiants, H. Pahlavani, Y. Guo, J. van de Laar, E. Simons, N. Saikumar, H. Sadeghian
Proceedings Volume 12955, 129553J (2024) https://doi.org/10.1117/12.3011239
KEYWORDS: Image enhancement, Image resolution, Resolution enhancement technologies, Scanning probe microscopy, Machine learning, Semiconductors, Metrology, Image restoration
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