Dr. Kyoung-Yoon Bang Profile

Dr. Kyoung-Yoon Bang

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 27 May 2010 Paper

The optical CD metrology for EUV mask

Jin-Back Park, Kyoung-Yoon Bang, Dong-Gun Lee, Hae-Young Jeong, Seung-Soo Kim, Han-Ku Cho

Proceedings Volume 7748, 77481X (2010) https://doi.org/10.1117/12.868293

KEYWORDS: Extreme ultraviolet, Photomasks, Ruthenium, Data modeling, Etching, Atomic force microscopy, EUV optics, Silicon, Scanning electron microscopy, Critical dimension metrology

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Proceedings Article | 17 October 2008 Paper

Mask process monitoring with optical CD measurements for sub-50-nm

Kyung-Yoon Bang, Jin-Back Park, Jeong-Hun Roh, Dong-Hoon Chung, Sung-Yong Cho, Yong-Hoon Kim, Sang-Gyun Woo, Han-Ku Cho

Proceedings Volume 7122, 71222V (2008) https://doi.org/10.1117/12.801416

KEYWORDS: Critical dimension metrology, Chromium, Scatterometry, Ultraviolet radiation, Scanning electron microscopy, Optical testing, Scatter measurement, Atomic force microscopy, Process control, Binary data

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Proceedings Article | 20 May 2006 Paper

The characterization of line-width in mask using spectrophotometry

Kyoung-Yoon Bang, Yo-Han Choi, Han-June Yoon, Hae-Young Jeong, Yong-Hoon Kim, Seung-Woon Choi, Hee-Sun Yoon, Woo-Sung Han

Proceedings Volume 6283, 62832H (2006) https://doi.org/10.1117/12.681791

KEYWORDS: Reflectivity, Spectrophotometry, Transmittance, Photomasks, Chromium, Critical dimension metrology, Refractive index, Optical lithography, Scatterometry, Inspection

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