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Dr. Lars Ragnarsson
at imec
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Publications (1)
Proceedings Article | 28 April 2023 Poster + Paper
Cost analysis of device options and scaling boosters below the A14 technology node
G. Mirabelli, A. Vandooren, C. Roda Neve, V. Gonzalez, H. Mertens, A. Farokhnejad, P. Schuddinck, G. Murdoch, S. Salahuddin, O. Zografos, L. Ragnarsson, P. Weckx, Z. Tokei, G. Hellings, J. Ryckaert
Proceedings Volume 12495, 124951K (2023) https://doi.org/10.1117/12.2656456
KEYWORDS: Semiconducting wafers, Metals, Back end of line, Silver, Optical lithography, Transmission electron microscopy, Nanosheets, Front end of line, Wafer bonding, Semiconductors
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