The spread of micro-optical elements fabrication by femtosecond 3D nanolithography is limited due to lack of available optically resilient photopolymers. We have conducted S-on-1 laser-induced damage threshold (LIDT) measurement experiment with two different photopolymers, which demonstrated varying damage probability distribution after which suitable linear approximation technique was not evident. Moreover, different optical damage mechanisms were present during laser irradiation of diverse photopolymers that featured different chemical composition and physical properties. Seeking to determine reliable LIDT evaluation method which would provide trustworthy results for all the investigated materials, we have used three different ISO standard-like approaches. Results comparison for two different cases was conducted concluding that linear approximation of input fluencies range where optical damage probability is 0%<P <100% provides the lowest LIDT value for discussed examples, at the same time showing consistent and suitable for practical applications results.
This work is dedicated for statistical investigation of laser induced damage threshold of a 3D fs laser lithography produced objects. Arrays of identical polymeric structures are produced out of different materials common in 3D printing and lithography and subjected to varying laser fluence resulting in polymeric objects either being damaged or not. Then, according to the damage probability, linear approximation is used to determine laser induced damage threshold in such structures. This way it is determined, that non photosensitized hybrid organicinorganic zirconium containing SZ2080 is the most resilient material in comparison to photosensitized SZ2080, other hybrid photopolymer OrmoClear, popular in lithography SU8 and Ember Clear used in 3D printing. Acquired results are compared to those obtained by other measurement techniques, advantages and drawbacks of such investigation are discussed.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.