Mr. Leonid Skigin Profile

Leonid Skigin

at Nanomotion Ltd

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Proceedings Article | 9 March 2020 Presentation

Long travel tip, tilt, z-stage (Conference Presentation)

Leonid Skigin, Roman Yasinov, Gal Peled, Alan Feinstein, Nir Karasikov

Proceedings Volume 11287, 112870T (2020) https://doi.org/10.1117/12.2546347

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Tip, Tilt, Z mechanisms are required in a diversity of applications including Semicon and Life-Science. A challenge is to realize a long travel design. Using Ultra Sonic Piezo motors, two long travel designs are demonstrated and analyzed. The challenges of achieving high stiffness and fast response are discussed. Accuracies in the nanometer linearly or micro radian angularly are attained. The stage design is modular and robust. Both vacuum and ambient pressure versions could be implemented. Experimental results are presented on positioning and scanning. The mechanism benefits further from previously developed capabilities with these motors: Vibration suppression by the motor itself, zero drift and fast response.

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