This paper presents the fabrication of a tunable Fabry-Perot (F-P) filter array using microelectromechanical systems (MEMS) technology for infrared multispectral imaging and infrared communication. The primary focus of the study is on the design and fabrication process of the F-P filter structure, resulting in the successful creation of a tunable 12×14 MEMS F-P filter array. The experimental findings demonstrate a tunable spectral range spanning from 3.78 μm to 4.89 μm, with a maximum wavelength tuning amplitude of 1.11 μm and a maximum spectral transmittance of 72%. The fabrication procedure demonstrates compatibility with the current CMOS process, hence enabling the incorporation of a tunable MEMS F-P filter module via MOEMS-CMOS heterogeneous integration technology. The MEMS F-P tunable filter, functioning as a dispersive component, exhibits promising potential for various applications such as wavelength division multiplexing, multispectral imaging, and gas sensing spectroscopy.
The eigenmode expansion method is applied to discretize the stepped shine grating into a binary shine grating. Various strategies that increase the directionality of the coupling efficiency have been optimized and replicated using this binary shining grating. We discussed and analyzed the impact of distributed Bragg reflectors, slits, and metal reflectors on the coupling efficiency of grating couplers. A metal reflector and slit were included in the design of a binary shine grating coupler. The coupling efficiency from the fiber to the waveguide of vertically incident electrically polarized light is 75.07% at 1600 nm. A 3 dB bandwidth of 77 nm from 1554 to 1631 nm is obtained.
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