Dr. Lingxuan Peng Profile

Dr. Lingxuan Peng

Sr. Process Engineer at Intel Corp

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Publications (1)

Proceedings Article | 23 November 2024 Presentation + Paper

Advanced absorber and compensation repair for EUV reticles utilizing a novel e-beam-based repair technique

Joseph Rodriguez, Scott Chegwidden, Andrew Elliott, Lingxuan Peng, Dinumol Devasia, Nathan Wilcox, Safak Sayan, Andrew Ridley, Franz-Josef Eberle, Michael Budach, Chanya Nguyen, Felix Hermanns, Horst Schneider, Klaus Edinger

Proceedings Volume 13216, 132160R (2024) https://doi.org/10.1117/12.3038766

KEYWORDS: Extreme ultraviolet, Reticles, Semiconducting wafers, Photomasks, Wafer level optics, Printing, Optics manufacturing, High volume manufacturing, Scanners, Reflection

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