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Liu Fang
at Xi'an Institute of Applied Optics
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Publications (1)
Proceedings Article | 31 January 2020 Paper
Discussion on the development method of multi-channel spectral filter based on hyperspectral
Liu Fang, Jun Wang
Proceedings Volume 11427, 1142725 (2020) https://doi.org/10.1117/12.2552219
KEYWORDS: Optical filters, Photomasks, Etching, Cameras, Metals, Imaging spectroscopy, Linear filtering, Photoresist materials, Spectroscopy, Lithography
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