Mr. Marcel Flemming Profile

Marcel Flemming

at Fraunhofer IOF

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 17 June 2009 Paper

AFM characterization of large area micro-optical elements

M. Oliva, T. Benkenstein, M. Flemming, U. Zeitner

Proceedings Volume 7389, 73893K (2009) https://doi.org/10.1117/12.834223

KEYWORDS: Atomic force microscopy, Scanning electron microscopy, Critical dimension metrology, Silica, Chromium, Optical components, Photomasks, Etching, Binary data, Associative arrays

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Proceedings Article | 20 October 2005 Paper

Scanning force microscopy for optical surface metrology

M. Flemming, K. Roder, A. Duparré

Proceedings Volume 5965, 59650A (2005) https://doi.org/10.1117/12.624341

KEYWORDS: Atomic force microscopy, Spatial frequencies, Multilayers, Semiconducting wafers, Silicon, Interference (communication), Metrology, Thin film coatings, Thin films, Nanostructures

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Proceedings Article | 25 February 2004 Paper

Modeling and characterizing thin film nanostructures for ultrahydrophobic surfaces with controlled optical scatter

Marcel Flemming, Annette Hultaker, Karsten Reihs, Angela Duparre

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512694

KEYWORDS: Coating, Thin films, Light scattering, Scattering, Nanostructures, Atomic force microscopy, Solids, Water, Optical interferometry, Scanning tunneling microscopy

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Proceedings Article | 4 November 2003 Paper

Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter

Marcel Flemming, Karsten Reihs, Angela Duparre

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505599

KEYWORDS: Optical inspection, Coating, Light scattering, Scattering, Glasses, Scatter measurement, Water, Reflection, Nanotechnology, Optical coatings

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Proceedings Article | 2 November 2000 Paper

DUV/VUV light scattering measurement of optical components for lithography applications

Stefan Gliech, Joerg Steinert, Marcel Flemming, Angela Duparre

Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405807

KEYWORDS: Scattering, Light scattering, Scatter measurement, Lamps, Optical spheres, Sensors, Optical testing, Optical components, Nitrogen, Lithography

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